Inventor

LEE KOON-WOO

KR3 patents

Patents

3 patents

US9741562B2Aug 22, 2017

Method for forming polysilicon film

EUGENE TECHNOLOGY CO LTD0 citations47

US10246773B2Apr 2, 2019

Method for forming amorphous thin film

EUGENE TECHNOLOGY CO LTD0 citations46

US9721798B2Aug 1, 2017

Method and apparatus for depositing amorphous silicon film

EUGENE TECHNOLOGY CO LTD0 citations37