Inventor

White Carl Louis

US29 patents

⚠️ This page may combine multiple inventors who share the name “White Carl Louis”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

White Carl Louis

ASM IP HOLDING BV

Multi-zone reactor, system including the reactor, and method of using the same

Reactant vaporizer and related systems and methods

Reactant vaporizer and related systems and methods

Apparatus and methods for isolating a reaction chamber from a loading chamber resulting in reduced contamination

Apparatus and methods for isolating a reaction chamber from a loading chamber resulting in reduced contamination

Semiconductor processing reactor and components thereof

Semiconductor processing reactor and components thereof

Semiconductor processing device

Heating zone separation for reactant evaporation system

Multi-zone reactor, system including the reactor, and method of using the same

Solid source sublimator

Substrate susceptor using edge purging

Substrate susceptor using edge purging

Solid source sublimator

Semiconductor processing device

Apparatus for detecting or monitoring for a chemical precursor in a high temperature environment

Solid source sublimator

Apparatus and methods for isolating a reaction chamber from a loading chamber resulting in reduced contamination

Heater assembly including cooling apparatus and method of using same

Reactor manifolds

Reactor manifolds

Reactant vaporizer and related systems and methods

Cross-flow reactor and method

Showerhead assembly for distributing a gas within a reaction chamber

Temperature-controlled chemical delivery system and reactor system including same

Channeled lift pin

Showerhead assembly and components

Semiconductor deposition reactor manifolds

APPLIED MATERIALS INC

Refillable large volume solid precursor sublimation vessel