Inventor
KULP JOHN
US4 patents
⚠️ This page may combine multiple inventors who share the name “KULP JOHN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
2 patentsUS6169274B1Jan 2, 2001
Heat treatment apparatus and method, detecting temperatures at plural positions each different in depth in holding plate, and estimating temperature of surface of plate corresponding to detected result
TOKYO ELECTRON LTD65 citations90
US7479463B2Jan 20, 2009
Method for heating a chemically amplified resist layer carried on a rotating substrate
TOKYO ELECTRON LTD5 citations60