P

Inventor

O'HARA ANTHONY

GB8 patents
⚠️ This page may combine multiple inventors who share the name “O'HARA ANTHONY”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

MEMSSTAR LTD

3 patents
US12358784B2Jul 15, 2025

Method of manufacturing a microstructure

MEMSSTAR LTD0 citations55
US11740185B2Aug 29, 2023

Method for detecting defects in thin film layers

MEMSSTAR LTD0 citations47
US10173894B2Jan 8, 2019

Selectivity in a xenon difluoride etch process

MEMSSTAR LTD0 citations45

O'HARA ANTHONY

2 patents
US8679354B2Mar 25, 2014

Method of etching a sacrificial silicon oxide layer

O'HARA ANTHONY62 citations92
US9786526B2Oct 10, 2017

Selectivity in a xenon difluoride etch process

O'HARA ANTHONY0 citations47

HERIOT WATT UNIV OF RICCARTON

1 patent
US5031980AJul 16, 1991

Flexible guides for light energy

HERIOT WATT UNIV OF RICCARTON4 citations52

POINT 35 MICROSTRUCTURES LTD

1 patent
US7672750B2Mar 2, 2010

Method and apparatus for monitoring a microstructure etching process

POINT 35 MICROSTRUCTURES LTD4 citations48

OHARA ANTHONY

1 patent
US10354884B2Jul 16, 2019

Vapour etch of silicon dioxide with improved selectivity

OHARA ANTHONY0 citations42