Inventor
PARK MI HYUN
KR5 patents
Patents
5 patentsUS12046464B2Jul 23, 2024
Substrate cleaning composition, method for cleaning substrate using the same, and method for fabricating semiconductor device using the same
SAMSUNG ELECTRONICS CO LTD0 citations56
US10795263B2Oct 6, 2020
Compositions for removing photoresist
SAMSUNG ELECTRONICS CO LTD0 citations49
US10025192B2Jul 17, 2018
Methods of manufacturing semiconductor devices using a composition for removing photoresist and methods of removing photoresist from a semiconductor substrate
SAMSUNG ELECTRONICS CO LTD0 citations49
US11149234B2Oct 19, 2021
Cleaning composition, cleaning apparatus, and method of fabricating semiconductor device using the same
SAMSUNG ELECTRONICS CO LTD0 citations47
US10435234B2Oct 8, 2019
Chemical liquid supply apparatus and semiconductor processing apparatus having the same
SAMSUNG ELECTRONICS CO LTD0 citations36