Inventor
KIMMAN MAARTEN HARTGER
NL9 patents
⚠️ This page may combine multiple inventors who share the name “KIMMAN MAARTEN HARTGER”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASML NETHERLANDS BV
7 patentsUS11156925B2Oct 26, 2021
Positioning system for a lithographic apparatus
ASML NETHERLANDS BV2 citations69
US11029612B2Jun 8, 2021
Bearing device, magnetic gravity compensator, vibration isolation system, lithographic apparatus, and method to control a gravity compensator having a negative stiffness
ASML NETHERLANDS BV5 citations66
US11303175B2Apr 12, 2022
Multiphase linear motor, multiphase planar motor, stage, lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV0 citations57
US11262663B2Mar 1, 2022
Tubular linear actuator, patterning device masking device and lithographic apparatus
ASML NETHERLANDS BV1 citations57
US12546379B2Feb 10, 2026
Positioning system, a lithographic apparatus, a driving force attenuation method, and a device manufacturing method
ASML NETHERLANDS BV0 citations52
US11621142B2Apr 4, 2023
Substrate positioning device and electron beam inspection tool
ASML NETHERLANDS BV0 citations48
US11837931B2Dec 5, 2023
Multiphase linear motor, multiphase planar motor, stage, lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV0 citations47