Inventor
HEO SEONGJUN
US10 patents
⚠️ This page may combine multiple inventors who share the name “HEO SEONGJUN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
LAM RES CORP
9 patentsUS11551938B2Jan 10, 2023
Alternating etch and passivation process
LAM RES CORP13 citations93
US11355353B2Jun 7, 2022
Tin oxide mandrels in patterning
LAM RES CORP15 citations85
US11848212B2Dec 19, 2023
Alternating etch and passivation process
LAM RES CORP10 citations84
US12183589B2Dec 31, 2024
Tin oxide mandrels in patterning
LAM RES CORP3 citations74
US12293919B2May 6, 2025
Alternating etch and passivation process
LAM RES CORP3 citations73
US9412609B1Aug 9, 2016
Highly selective oxygen free silicon nitride etch
LAM RES CORP3 citations71
US12191125B2Jan 7, 2025
Removing metal contamination from surfaces of a processing chamber
LAM RES CORP0 citations59
US11842888B2Dec 12, 2023
Removing metal contamination from surfaces of a processing chamber
LAM RES CORP1 citations59
US12532675B2Jan 20, 2026
Core removal
LAM RES CORP0 citations55