Inventor
VOLOSSKIY BORIS
US15 patents
Patents
15 patentsUS12105422B2Oct 1, 2024
Photoresist development with halide chemistries
LAM RES CORP13 citations94
US11322351B2May 3, 2022
Tin oxide films in semiconductor device manufacturing
LAM RES CORP15 citations94
US10546748B2Jan 28, 2020
Tin oxide films in semiconductor device manufacturing
LAM RES CORP25 citations94
US12094711B2Sep 17, 2024
Tin oxide films in semiconductor device manufacturing
LAM RES CORP5 citations86
US11355353B2Jun 7, 2022
Tin oxide mandrels in patterning
LAM RES CORP15 citations85
US12211691B2Jan 28, 2025
Dry development of resists
LAM RES CORP8 citations84
US12437995B2Oct 7, 2025
Tin oxide films in semiconductor device manufacturing
LAM RES CORP1 citations75
US12417916B2Sep 16, 2025
Tin oxide films in semiconductor device manufacturing
LAM RES CORP1 citations75
US12510825B2Dec 30, 2025
Photoresist development with halide chemistries
LAM RES CORP2 citations74
US12510826B2Dec 30, 2025
Photoresist development with halide chemistries
LAM RES CORP2 citations74
US12183589B2Dec 31, 2024
Tin oxide mandrels in patterning
LAM RES CORP3 citations74
US12062538B2Aug 13, 2024
Atomic layer etch and selective deposition process for extreme ultraviolet lithography resist improvement
LAM RES CORP3 citations73
US12436464B2Oct 7, 2025
Pre-exposure photoresist curing to enhance EUV lithographic performance
LAM RES CORP2 citations69
US10103056B2Oct 16, 2018
Methods for wet metal seed deposition for bottom up gapfill of features
LAM RES CORP0 citations51
US12585184B2Mar 24, 2026
Photoresist with multiple patterning radiation-absorbing elements and/or vertical composition gradient
LAM RES CORP0 citations44