Inventor
WEN HAORAN
US7 patents
Patents
7 patentsUS11137250B2Oct 5, 2021
Comb-driven substrate decoupled annulus pitch/roll BAW gyroscope with slanted quadrature tuning electrode
GEORGIA TECH RES INST3 citations71
US10634499B2Apr 28, 2020
MEMS inertial measurement apparatus having slanted electrodes for quadrature tuning
GEORGIA TECH RES INST2 citations71
US10921123B2Feb 16, 2021
Pitch/roll annulus gyroscope with slanted quadrature tuning electrodes and related fabrication methods
GEORGIA TECH RES INST2 citations68
US11644313B2May 9, 2023
Substrate-decoupled high-coriolis-coupling pitch/roll gyroscope
GEORGIA TECH RES INST1 citations61
US11566898B2Jan 31, 2023
Comb-driven substrate decoupled annulus pitch/roll BAW gyroscope with slanted quadrature tuning electrode
GEORGIA TECH RES INST0 citations61
US11280612B2Mar 22, 2022
MEMS inertial measurement apparatus having slanted electrodes for quadrature tuning
GEORGIA TECH RES INST0 citations61
US11280613B2Mar 22, 2022
MEMS inertial measurement apparatus having slanted electrodes for quadrature tuning
GEORGIA TECH RES INST0 citations61