Inventor
BORENSTEIN MICHAEL D
US14 patents
⚠️ This page may combine multiple inventors who share the name “BORENSTEIN MICHAEL D”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
BROOKS AUTOMATION INC
6 patentsUS7207224B2Apr 24, 2007
Wide-range combination vacuum gauge
BROOKS AUTOMATION INC37 citations90
US7331237B2Feb 19, 2008
Technique for improving Pirani gauge temperature compensation over its full pressure range
BROOKS AUTOMATION INC15 citations83
US7429863B2Sep 30, 2008
Method and apparatus for maintaining emission capabilities of hot cathodes in harsh environments
BROOKS AUTOMATION INC8 citations71
US7249516B2Jul 31, 2007
Method of operating a resistive heat-loss pressure sensor
BROOKS AUTOMATION INC2 citations62
US7656165B2Feb 2, 2010
Method and apparatus for maintaining emission capabilities of hot cathodes in harsh environments
BROOKS AUTOMATION INC0 citations50
US7418869B2Sep 2, 2008
Wide-range combination vacuum gauge
BROOKS AUTOMATION INC1 citations50
GRANVILLE PHILLIPS COMPANY
4 patentsUS5422573AJun 6, 1995
Ionization gauge and method of using and calibrating same
GRANVILLE PHILLIPS COMPANY54 citations95
US5296817AMar 22, 1994
Ionization gauge and method of using and calibrating same
GRANVILLE PHILLIPS COMPANY22 citations91
US5250906AOct 5, 1993
Ionization gauge and method of using and calibrating same
GRANVILLE PHILLIPS COMPANY38 citations91
US5452613ASep 26, 1995
Wide range vacuum gauge
GRANVILLE PHILLIPS COMPANY15 citations72
HELIX TECH CORP
4 patentsUS6945119B2Sep 20, 2005
Apparatus and methods for heat loss pressure measurement
HELIX TECH CORP17 citations92
US6865952B2Mar 15, 2005
Apparatus and methods for heat loss pressure measurement
HELIX TECH CORP36 citations92
US6799468B2Oct 5, 2004
Apparatus and methods for heat loss pressure measurement
HELIX TECH CORP22 citations92
US6938493B2Sep 6, 2005
Apparatus and methods for heat loss pressure measurement
HELIX TECH CORP6 citations73