Inventor
LO HANSEL
US17 patents
⚠️ This page may combine multiple inventors who share the name “LO HANSEL”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
16 patentsUS11732355B2Aug 22, 2023
Method and apparatus for supplying improved gas flow to a processing volume of a processing chamber
APPLIED MATERIALS INC5 citations74
US11959169B2Apr 16, 2024
Asymmetric injection for better wafer uniformity
APPLIED MATERIALS INC2 citations72
US11501954B2Nov 15, 2022
Dogbone inlet cone profile for remote plasma oxidation chamber
APPLIED MATERIALS INC1 citations72
US11486038B2Nov 1, 2022
Asymmetric injection for better wafer uniformity
APPLIED MATERIALS INC3 citations72
USD924825SJul 13, 2021
Chamber inlet
APPLIED MATERIALS INC2 citations72
US11049696B2Jun 29, 2021
Dogbone inlet cone profile for remote plasma oxidation chamber
APPLIED MATERIALS INC3 citations72
US10847337B2Nov 24, 2020
Side inject designs for improved radical concentrations
APPLIED MATERIALS INC2 citations72
US10636626B2Apr 28, 2020
Dogbone inlet cone profile for remote plasma oxidation chamber
APPLIED MATERIALS INC3 citations72
USD1023987SApr 23, 2024
Chamber inlet
APPLIED MATERIALS INC0 citations62
US11501945B2Nov 15, 2022
Side inject designs for improved radical concentrations
APPLIED MATERIALS INC1 citations62
US11081340B2Aug 3, 2021
Argon addition to remote plasma oxidation
APPLIED MATERIALS INC0 citations61
US10636650B2Apr 28, 2020
Argon addition to remote plasma oxidation
APPLIED MATERIALS INC1 citations61
US12139790B2Nov 12, 2024
Processing system and method of delivering a reactant gas
APPLIED MATERIALS INC0 citations59
US12473644B2Nov 18, 2025
Growth of thin oxide layer with silicon nitride and conversion
APPLIED MATERIALS INC0 citations58
US12463030B2Nov 4, 2025
Selective oxidation of a substrate
APPLIED MATERIALS INC0 citations58
US12559841B2Feb 24, 2026
Plenum driven hydroxyl combustion oxidation
APPLIED MATERIALS INC0 citations47