Inventor

TJANDRA AGUS SOFIAN

US19 patents

⚠️ This page may combine multiple inventors who share the name “TJANDRA AGUS SOFIAN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

TJANDRA AGUS SOFIAN

APPLIED MATERIALS INC

Gas injection apparatus and substrate process chamber incorporating same

Method and apparatus for supplying improved gas flow to a processing volume of a processing chamber

Dogbone inlet cone profile for remote plasma oxidation chamber

Chamber inlet

Dogbone inlet cone profile for remote plasma oxidation chamber

Side inject designs for improved radical concentrations

Dogbone inlet cone profile for remote plasma oxidation chamber

Side inject nozzle design for processing chamber

Chamber inlet

Side inject designs for improved radical concentrations

Side inject nozzle design for processing chamber

Gas injection apparatus with heating channels

Remote plasma oxidation chamber

Silicon germanium selective oxidation process

Silicon germanium selective oxidation process

Gas injection apparatus with heating channels

H2/O2 side inject to improve process uniformity for low temperature oxidation process

YOKOTA YOSHITAKA

Methods of forming oxide layers on substrates

APPLIED MAT INC

Method and apparatus for supplying improved gas flow to a processing volume of a processing chamber