Inventor
KAUFMAN-OSBORN TOBIN
US29 patents
⚠️ This page may combine multiple inventors who share the name “KAUFMAN-OSBORN TOBIN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
24 patentsUS10358715B2Jul 23, 2019
Integrated cluster tool for selective area deposition
APPLIED MATERIALS INC15 citations86
US9716005B1Jul 25, 2017
Plasma poisoning to enable selective deposition
APPLIED MATERIALS INC13 citations84
US11732355B2Aug 22, 2023
Method and apparatus for supplying improved gas flow to a processing volume of a processing chamber
APPLIED MATERIALS INC5 citations74
US11610776B2Mar 21, 2023
Method of linearized film oxidation growth
APPLIED MATERIALS INC2 citations73
US11066747B2Jul 20, 2021
Chemical delivery chamber for self-assembled monolayer processes
APPLIED MATERIALS INC3 citations73
US10947621B2Mar 16, 2021
Low vapor pressure chemical delivery
APPLIED MATERIALS INC2 citations73
US11959169B2Apr 16, 2024
Asymmetric injection for better wafer uniformity
APPLIED MATERIALS INC2 citations72
US11486038B2Nov 1, 2022
Asymmetric injection for better wafer uniformity
APPLIED MATERIALS INC3 citations72
USD924825SJul 13, 2021
Chamber inlet
APPLIED MATERIALS INC2 citations72
US10847337B2Nov 24, 2020
Side inject designs for improved radical concentrations
APPLIED MATERIALS INC2 citations72
US10192752B2Jan 29, 2019
Self-assembled monolayer blocking with intermittent air-water exposure
APPLIED MATERIALS INC3 citations72
US12261039B2Mar 25, 2025
Method of linearized film oxidation growth
APPLIED MATERIALS INC0 citations62
USD1023987SApr 23, 2024
Chamber inlet
APPLIED MATERIALS INC0 citations62
US11735420B2Aug 22, 2023
Wafer treatment for achieving defect-free self-assembled monolayers
APPLIED MATERIALS INC0 citations62
US11725274B2Aug 15, 2023
Integrated cluster tool for selective area deposition
APPLIED MATERIALS INC0 citations62
US11501945B2Nov 15, 2022
Side inject designs for improved radical concentrations
APPLIED MATERIALS INC1 citations62
US10954594B2Mar 23, 2021
High temperature vapor delivery system and method
APPLIED MATERIALS INC0 citations62
US10818510B2Oct 27, 2020
Self-assembled monolayer blocking with intermittent air-water exposure
APPLIED MATERIALS INC1 citations62
US10770292B2Sep 8, 2020
Wafer treatment for achieving defect-free self-assembled monolayers
APPLIED MATERIALS INC1 citations62
US10366878B2Jul 30, 2019
Selective deposition through formation of self-assembled monolayers
APPLIED MATERIALS INC1 citations62
US12291779B2May 6, 2025
Methods of selective atomic layer deposition
APPLIED MATERIALS INC0 citations61
US11821085B2Nov 21, 2023
Methods of selective atomic layer deposition
APPLIED MATERIALS INC0 citations61
US12139790B2Nov 12, 2024
Processing system and method of delivering a reactant gas
APPLIED MATERIALS INC0 citations59
US9947539B2Apr 17, 2018
Plasma poisoning to enable selective deposition
APPLIED MATERIALS INC0 citations52
UNIV CALIFORNIA
4 patentsUS10134585B2Nov 20, 2018
Low temperature atomic layer deposition of oxides on compound semiconductors
UNIV CALIFORNIA5 citations70
US10483097B2Nov 19, 2019
Method for cleaning, passivation and functionalization of Si—Ge semiconductor surfaces
UNIV CALIFORNIA0 citations48
US9818599B2Nov 14, 2017
Method for in-situ dry cleaning, passivation and functionalization of Si—Ge semiconductor surfaces
UNIV CALIFORNIA0 citations48
US9117653B2Aug 25, 2015
Method for in-situ dry cleaning, passivation and functionalization of Ge semiconductor surfaces
UNIV CALIFORNIA0 citations48