Inventor
SONG SOO HAN
KR4 patents
⚠️ This page may combine multiple inventors who share the name “SONG SOO HAN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SEMES CO LTD
3 patentsUS12518983B2Jan 6, 2026
Unit for supplying chemical and apparatus for treating substrate with the unit
SEMES CO LTD0 citations56
US12518985B2Jan 6, 2026
Wafer heating apparatus and wafer processing apparatus using the same
SEMES CO LTD0 citations55
US12519007B2Jan 6, 2026
Support unit and substrate treating apparatus
SEMES CO LTD0 citations42