Inventor
DEBOER WIEBE B
NL15 patents
⚠️ This page may combine multiple inventors who share the name “DEBOER WIEBE B”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
EPSILON TECHN INC
7 patentsUS5198034AMar 30, 1993
Rotatable substrate supporting mechanism with temperature sensing device for use in chemical vapor deposition equipment
EPSILON TECHN INC279 citations99
US4828224AMay 9, 1989
Chemical vapor deposition system
EPSILON TECHN INC557 citations98
US5318634AJun 7, 1994
Substrate supporting apparatus
EPSILON TECHN INC26 citations92
US5117769AJun 2, 1992
Drive shaft apparatus for a susceptor
EPSILON TECHN INC53 citations92
US5092728AMar 3, 1992
Substrate loading apparatus for a CVD process
EPSILON TECHN INC51 citations92
US4996942AMar 5, 1991
Rotatable substrate supporting susceptor with temperature sensors
EPSILON TECHN INC36 citations92
US4993355AFeb 19, 1991
Susceptor with temperature sensing device
EPSILON TECHN INC13 citations74
ADVANCED SEMICONDUCTOR MAT
3 patentsUS5374315ADec 20, 1994
Rotatable substrate supporting mechanism with temperature sensing device for use in chemical vapor deposition equipment
ADVANCED SEMICONDUCTOR MAT506 citations99
US5435682AJul 25, 1995
Chemical vapor desposition system
ADVANCED SEMICONDUCTOR MAT74 citations96
US5427620AJun 27, 1995
Rotatable substrate supporting mechanism with temperature sensing device for use in chemical vapor deposition equipment
ADVANCED SEMICONDUCTOR MAT59 citations96