Inventor
HECHT LEWIS C
US4 patents
Patents
4 patentsUS5451131ASep 19, 1995
Dockable interface airlock between process enclosure and interprocess transfer container
IBM57 citations93
US5364225ANov 15, 1994
Method of printed circuit panel manufacture
IBM29 citations88
US5395198AMar 7, 1995
Vacuum loading chuck and fixture for flexible printed circuit panels
IBM19 citations71
US5339952AAug 23, 1994
Transfer container for transferring flimsy circuit panels under clean room conditions
IBM3 citations60