Inventor

NICOLET MARC-A

US3 patents

⚠️ This page may combine multiple inventors who share the name “NICOLET MARC-A”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

CALIFORNIA INST OF TECHN

2 patents

US5997949ADec 7, 1999

Synthesis of W-Si-N films by chemical vapor deposition using WF6, SiH4 and NH3

CALIFORNIA INST OF TECHN25 citations89

US4012235AMar 15, 1977

Solid phase epitaxial growth

CALIFORNIA INST OF TECHN20 citations79

SANDIA CORP

1 patent

US5916634AJun 29, 1999

Chemical vapor deposition of W-Si-N and W-B-N

SANDIA CORP81 citations93