Inventor
MIMASAKA MASAHIRO
JP7 patents
Patents
7 patentsUS5989632ANov 23, 1999
Coating solution applying method and apparatus
DAINIPPON SCREEN MFG54 citations95
US5020200AJun 4, 1991
Apparatus for treating a wafer surface
DAINIPPON SCREEN MFG81 citations95
US4998021AMar 5, 1991
Method of detecting an end point of surface treatment
DAINIPPON SCREEN MFG90 citations94
US5984540ANov 16, 1999
Developing apparatus and developing method
DAINIPPON SCREEN MFG27 citations91
US6089762AJul 18, 2000
Developing apparatus, developing method and substrate processing apparatus
DAINIPPON SCREEN MFG27 citations89
US6076979AJun 20, 2000
Method of and apparatus for supplying developing solution onto substrate
DAINIPPON SCREEN MFG36 citations89
US5865893AFeb 2, 1999
Spin coating apparatus
DAINIPPON SCREEN MFG3 citations62