Inventor
ZUNIGA STEVEN
US16 patents
Patents
16 patentsUS6159079ADec 12, 2000
Carrier head for chemical mechanical polishing a substrate
APPLIED MATERIALS INC152 citations99
US6132298AOct 17, 2000
Carrier head with edge control for chemical mechanical polishing
APPLIED MATERIALS INC118 citations99
US6776692B1Aug 17, 2004
Closed-loop control of wafer polishing in a chemical mechanical polishing system
APPLIED MATERIALS INC92 citations98
US6277014B1Aug 21, 2001
Carrier head with a flexible membrane for chemical mechanical polishing
APPLIED MATERIALS INC93 citations98
US6162116ADec 19, 2000
Carrier head for chemical mechanical polishing
APPLIED MATERIALS INC91 citations98
US6217426B1Apr 17, 2001
CMP polishing pad
APPLIED MATERIALS INC83 citations97
US6663466B2Dec 16, 2003
Carrier head with a substrate detector
APPLIED MATERIALS INC59 citations96
US6575825B2Jun 10, 2003
CMP polishing pad
APPLIED MATERIALS INC49 citations96
US6361420B1Mar 26, 2002
Method of chemical mechanical polishing with edge control
APPLIED MATERIALS INC55 citations96
US6165058ADec 26, 2000
Carrier head for chemical mechanical polishing
APPLIED MATERIALS INC46 citations96
US6572446B1Jun 3, 2003
Chemical mechanical polishing pad conditioning element with discrete points and compliant membrane
APPLIED MATERIALS INC46 citations93
US7018275B2Mar 28, 2006
Closed-loop control of wafer polishing in a chemical mechanical polishing system
APPLIED MATERIALS INC23 citations92
US6857931B2Feb 22, 2005
Method of detecting a substrate in a carrier head
APPLIED MATERIALS INC25 citations92
US6705932B1Mar 16, 2004
Carrier head for chemical mechanical polishing
APPLIED MATERIALS INC31 citations92
US6514124B1Feb 4, 2003
Carrier head for chemical mechanical polishing a substrate
APPLIED MATERIALS INC24 citations92
US6406361B1Jun 18, 2002
Carrier head for chemical mechanical polishing
APPLIED MATERIALS INC34 citations92