Inventor
MOUNTSIER THOMAS WELLER
US7 patents
⚠️ This page may combine multiple inventors who share the name “MOUNTSIER THOMAS WELLER”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
NOVELLUS SYSTEMS INC
3 patentsUS6054206AApr 25, 2000
Chemical vapor deposition of low density silicon dioxide films
NOVELLUS SYSTEMS INC167 citations97
US6184572B1Feb 6, 2001
Interlevel dielectric stack containing plasma deposited fluorinated amorphous carbon films for semiconductor devices
NOVELLUS SYSTEMS INC60 citations95
US6238751B1May 29, 2001
Chemical vapor deposition of low density silicon dioxide films
NOVELLUS SYSTEMS INC75 citations94
LAM RES CORP
3 patentsUS9190489B1Nov 17, 2015
Sacrificial pre-metal dielectric for self-aligned contact scheme
LAM RES CORP31 citations93
US9418889B2Aug 16, 2016
Selective formation of dielectric barriers for metal interconnects in semiconductor devices
LAM RES CORP8 citations84
US9379210B2Jun 28, 2016
Sacrificial pre-metal dielectric for self-aligned contact scheme
LAM RES CORP7 citations83