Inventor
SATITPUNWAYCHA PETER
US11 patents
⚠️ This page may combine multiple inventors who share the name “SATITPUNWAYCHA PETER”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
8 patentsUS7128806B2Oct 31, 2006
Mask etch processing apparatus
APPLIED MATERIALS INC131 citations98
US6045666AApr 4, 2000
Aluminum hole filling method using ionized metal adhesion layer
APPLIED MATERIALS INC61 citations96
US6219219B1Apr 17, 2001
Cathode assembly containing an electrostatic chuck for retaining a wafer in a semiconductor wafer processing system
APPLIED MATERIALS INC63 citations93
US6238533B1May 29, 2001
Integrated PVD system for aluminum hole filling using ionized metal adhesion layer
APPLIED MATERIALS INC33 citations92
US6159055ADec 12, 2000
RF electrode contact assembly for a detachable electrostatic chuck
APPLIED MATERIALS INC45 citations91
US6139679AOct 31, 2000
Coil and coil feedthrough
APPLIED MATERIALS INC13 citations72
US7879151B2Feb 1, 2011
Mask etch processing apparatus
APPLIED MATERIALS INC2 citations62
US7682984B2Mar 23, 2010
Interferometer endpoint monitoring device
APPLIED MATERIALS INC0 citations51