Inventor
SUZUKI MIEKO
JP15 patents
⚠️ This page may combine multiple inventors who share the name “SUZUKI MIEKO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
NEC CORP
9 patentsUS5420075AMay 30, 1995
Forming multi-layered interconnections with fluorine compound treatment permitting selective deposition of insulator
NEC CORP293 citations98
US6361708B1Mar 26, 2002
Method and apparatus for polishing a metal film
NEC CORP22 citations92
US5607880AMar 4, 1997
Method of fabricating multilevel interconnections in a semiconductor integrated circuit
NEC CORP40 citations92
US5491108AFeb 13, 1996
Method of producing semiconductor integrated circuit device having interplayer insulating film covering substrate
NEC CORP20 citations92
US5332694AJul 26, 1994
Process for manufacturing a semiconductor device
NEC CORP27 citations92
US6235071B1May 22, 2001
Chemical mechanical polishing method for highly accurate in-plane uniformity in polishing rate over position
NEC CORP14 citations73
US6054383AApr 25, 2000
Fabrication method of semiconductor device
NEC CORP11 citations73
US5904558AMay 18, 1999
Fabrication process of semiconductor device
NEC CORP11 citations73
US6110014AAug 29, 2000
Method and apparatus polishing wafer for extended effective area of wafer
NEC CORP1 citations51
NEC ELECTRONICS CORP
3 patentsUS6783446B1Aug 31, 2004
Chemical mechanical polishing apparatus and method of chemical mechanical polishing
NEC ELECTRONICS CORP6 citations73
US6551914B1Apr 22, 2003
Method of forming polish stop by plasma treatment for interconnection
NEC ELECTRONICS CORP11 citations73
US6951512B2Oct 4, 2005
Chemical mechanical polishing apparatus and method of chemical mechanical polishing
NEC ELECTRONICS CORP1 citations51
SONY CORP
2 patentsUS7123336B2Oct 17, 2006
Twisted nematic liquid crystal material with certain values for dielectric constant anisotropy, twisted elasticity modulus and refractive index anisotropy
SONY CORP2 citations61
US7167229B2Jan 23, 2007
Liquid crystal display element and projection display device
SONY CORP0 citations50