Inventor
SAKAI TAKAMASA
JP29 patents
⚠️ This page may combine multiple inventors who share the name “SAKAI TAKAMASA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
DAINIPPON SCREEN MFG
15 patentsUS4746857AMay 24, 1988
Probing apparatus for measuring electrical characteristics of semiconductor device formed on wafer
DAINIPPON SCREEN MFG108 citations95
US5233291AAug 3, 1993
Method of and apparatus for measuring electric characteristics of semiconductor wafer
DAINIPPON SCREEN MFG59 citations94
US6598805B2Jul 29, 2003
Substrate cleaning apparatus
DAINIPPON SCREEN MFG33 citations92
US5857474AJan 12, 1999
Method of and apparatus for washing a substrate
DAINIPPON SCREEN MFG45 citations92
US4803948AFeb 14, 1989
Heat processing apparatus for semiconductor manufacturing
DAINIPPON SCREEN MFG38 citations92
US4798926AJan 17, 1989
Method of heating semiconductor and susceptor used therefor
DAINIPPON SCREEN MFG37 citations92
US4693208ASep 15, 1987
Feeder of oxygen gas containing steam
DAINIPPON SCREEN MFG26 citations92
US5239183AAug 24, 1993
Optical gap measuring device using frustrated internal reflection
DAINIPPON SCREEN MFG28 citations91
US5225690AJul 6, 1993
Gap measuring device and method using frustrated internal reflection
DAINIPPON SCREEN MFG25 citations91
US4849608AJul 18, 1989
Apparatus for heat-treating wafers
DAINIPPON SCREEN MFG31 citations91
US4883424ANov 28, 1989
Apparatus for heat treating substrates
DAINIPPON SCREEN MFG20 citations76
US7073521B2Jul 11, 2006
Substrate processing apparatus comprising ring-shaped motor
DAINIPPON SCREEN MFG8 citations74
US5554939ASep 10, 1996
Non-destructive measuring sensor for semiconductor wafer and method of manufacturing the same
DAINIPPON SCREEN MFG14 citations73
US5444389AAug 22, 1995
Method and apparatus for measuring lifetime of minority carriers in semiconductor
DAINIPPON SCREEN MFG9 citations73
US7869062B2Jan 11, 2011
Apparatus for supporting substrate, apparatus for measuring surface potential, apparatus for measuring film thickness, and apparatus for inspecting substrate
DAINIPPON SCREEN MFG2 citations62
CLARION CO LTD
10 patentsUS4630082ADec 16, 1986
Semiconductor device with multi-electrode construction equivalent to variable capacitance diode
CLARION CO LTD30 citations92
US4456917AJun 26, 1984
Variable capacitor
CLARION CO LTD22 citations82
US4529995AJul 16, 1985
Variable capacitance device
CLARION CO LTD10 citations74
US4529994AJul 16, 1985
Variable capacitor with single depletion layer
CLARION CO LTD14 citations74
US4449141AMay 15, 1984
Variable capacitor
CLARION CO LTD11 citations74
US4412906ANov 1, 1983
Sputtering apparatus
CLARION CO LTD19 citations74
US4365216ADec 21, 1982
Surface-acoustic-wave device
CLARION CO LTD14 citations74
US4357553ANov 2, 1982
Surface-acoustic-wave device
CLARION CO LTD9 citations72
US4473767ASep 25, 1984
Surface acoustic wave convolver with depletion layer control
CLARION CO LTD5 citations63
US4466876AAug 21, 1984
Thin layer depositing apparatus
CLARION CO LTD5 citations63