P

Inventor

SAKAI TAKAMASA

JP29 patents
⚠️ This page may combine multiple inventors who share the name “SAKAI TAKAMASA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

DAINIPPON SCREEN MFG

15 patents
US4746857AMay 24, 1988

Probing apparatus for measuring electrical characteristics of semiconductor device formed on wafer

DAINIPPON SCREEN MFG108 citations95
US5233291AAug 3, 1993

Method of and apparatus for measuring electric characteristics of semiconductor wafer

DAINIPPON SCREEN MFG59 citations94
US6598805B2Jul 29, 2003

Substrate cleaning apparatus

DAINIPPON SCREEN MFG33 citations92
US5857474AJan 12, 1999

Method of and apparatus for washing a substrate

DAINIPPON SCREEN MFG45 citations92
US4803948AFeb 14, 1989

Heat processing apparatus for semiconductor manufacturing

DAINIPPON SCREEN MFG38 citations92
US4798926AJan 17, 1989

Method of heating semiconductor and susceptor used therefor

DAINIPPON SCREEN MFG37 citations92
US4693208ASep 15, 1987

Feeder of oxygen gas containing steam

DAINIPPON SCREEN MFG26 citations92
US5239183AAug 24, 1993

Optical gap measuring device using frustrated internal reflection

DAINIPPON SCREEN MFG28 citations91
US5225690AJul 6, 1993

Gap measuring device and method using frustrated internal reflection

DAINIPPON SCREEN MFG25 citations91
US4849608AJul 18, 1989

Apparatus for heat-treating wafers

DAINIPPON SCREEN MFG31 citations91
US4883424ANov 28, 1989

Apparatus for heat treating substrates

DAINIPPON SCREEN MFG20 citations76
US7073521B2Jul 11, 2006

Substrate processing apparatus comprising ring-shaped motor

DAINIPPON SCREEN MFG8 citations74
US5554939ASep 10, 1996

Non-destructive measuring sensor for semiconductor wafer and method of manufacturing the same

DAINIPPON SCREEN MFG14 citations73
US5444389AAug 22, 1995

Method and apparatus for measuring lifetime of minority carriers in semiconductor

DAINIPPON SCREEN MFG9 citations73
US7869062B2Jan 11, 2011

Apparatus for supporting substrate, apparatus for measuring surface potential, apparatus for measuring film thickness, and apparatus for inspecting substrate

DAINIPPON SCREEN MFG2 citations62

CLARION CO LTD

10 patents

UNIV TOKYO

2 patents

PANASONIC CORP

1 patent

MATSUSHITA ELECTRIC INDUSTRIAL CO LTD

1 patent