Inventor
SHIBANO YUKIO
JP15 patents
⚠️ This page may combine multiple inventors who share the name “SHIBANO YUKIO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SHINETSU CHEMICAL CO
13 patentsUS6855908B2Feb 15, 2005
Glass substrate and leveling thereof
SHINETSU CHEMICAL CO23 citations92
US6413682B1Jul 2, 2002
Synthetic quartz glass substrate for photomask and making method
SHINETSU CHEMICAL CO47 citations92
US6869732B2Mar 22, 2005
Glass substrate for photomasks and preparation method
SHINETSU CHEMICAL CO16 citations83
US7906256B2Mar 15, 2011
Recycling of large-size photomask substrate
SHINETSU CHEMICAL CO2 citations61
US6928837B2Aug 16, 2005
Silica glass substrates and their selection
SHINETSU CHEMICAL CO6 citations61
US7745071B2Jun 29, 2010
Large-sized glass substrate
SHINETSU CHEMICAL CO2 citations60
US7608542B2Oct 27, 2009
Large-size glass substrate for photomask and making method, computer-readable recording medium, and mother glass exposure method
SHINETSU CHEMICAL CO4 citations60
US7191618B2Mar 20, 2007
Large-sized substrate and method of producing the same
SHINETSU CHEMICAL CO2 citations60
US7183210B2Feb 27, 2007
Method for preparing large-size substrate
SHINETSU CHEMICAL CO6 citations60
US8012563B2Sep 6, 2011
Large-size substrate
SHINETSU CHEMICAL CO2 citations58
US9919962B2Mar 20, 2018
Polishing agent for synthetic quartz glass substrate
SHINETSU CHEMICAL CO0 citations51
US9316902B2Apr 19, 2016
Photomask-forming glass substrate and making method
SHINETSU CHEMICAL CO0 citations51
US7588481B2Sep 15, 2009
Wafer polishing method and polished wafer
SHINETSU CHEMICAL CO1 citations48