Inventor
MITROVIC ANDREJ
US13 patents
⚠️ This page may combine multiple inventors who share the name “MITROVIC ANDREJ”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
10 patentsUS7230204B2Jun 12, 2007
Method and system for temperature control of a substrate
TOKYO ELECTRON LTD54 citations95
US6677604B2Jan 13, 2004
Optical system and method for plasma optical emission analysis
TOKYO ELECTRON LTD22 citations91
US7075031B2Jul 11, 2006
Method of and structure for controlling electrode temperature
TOKYO ELECTRON LTD43 citations89
US8036869B2Oct 11, 2011
System and method for using first-principles simulation to control a semiconductor manufacturing process via a simulation result or a derived empirical model
TOKYO ELECTRON LTD11 citations83
US7073383B2Jul 11, 2006
Apparatus and method for determining clamping status of semiconductor wafer
TOKYO ELECTRON LTD9 citations73
US12529655B2Jan 20, 2026
Broom camera and rotational stage for metrology measurements
TOKYO ELECTRON LTD0 citations62
US7109788B2Sep 19, 2006
Apparatus and method of improving impedance matching between an RF signal and a multi- segmented electrode
TOKYO ELECTRON LTD4 citations62
US7020583B2Mar 28, 2006
Method and apparatus for determining chemistry of part's residual contamination
TOKYO ELECTRON LTD5 citations61
US12158374B2Dec 3, 2024
Time-resolved OES data collection
TOKYO ELECTRON LTD0 citations58
US6713969B2Mar 30, 2004
Method and apparatus for determination and control of plasma state
TOKYO ELECTRON LTD0 citations47
STRANG ERIC J
2 patentsUS8296687B2Oct 23, 2012
System and method for using first-principles simulation to analyze a process performed by a semiconductor processing tool
STRANG ERIC J10 citations82
US8073667B2Dec 6, 2011
System and method for using first-principles simulation to control a semiconductor manufacturing process
STRANG ERIC J12 citations82