Inventor

JANG SANG-DON

KR25 patents

⚠️ This page may combine multiple inventors who share the name “JANG SANG-DON”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

JANG SANG-DON

SAMSUNG ELECTRONICS CO LTD

LCD glass cassette

Position adjusting unit of optical element and maskless exposure apparatus including the same

Fixing module for fixing an optical system to an optical apparatus and an optical apparatus including the same

Method of aligning an exposure apparatus, method of exposing a photoresist film using the same and exposure apparatus for performing the method of exposing a photoresist film

Stage device and driving method thereof

Non-contact feeder system

Reflector structure of illumination optic system

Apparatus and method of controlling chuck, and exposure apparatus and control method thereof

Maskless lithographic apparatus measuring accumulated amount of light

AHN SUNG MIN

Workpiece alignment device

Maskless exposure apparatus and method of alignment for overlay in maskless exposure

Maskless exposure apparatus and method

Maskless exposure apparatus and method to determine exposure start position and orientation in maskless lithography

SAMSUNG DISPLAY CO LTD

Maskless exposure device and method for compensating cumulative illumination using the same

Maskless exposure device, maskless exposure method and display substrate manufactured by the maskless exposure device and the maskless exposure method

Stage transferring device and position measuring method thereof

PARK SANG HYUN

Exposure apparatus including the exposure head and control method thereof

Lens barrel support device and maskless exposure apparatus having the same

KIM JA YUL

Apparatus and method of controlling chuck, and exposure apparatus and control method thereof

Ultra-precision position control device and method for determining position and attitude information associated with a 6-degree-of-freedom stage thereof

PARK SANG-HYUN

Method of aligning an exposure apparatus, method of exposing a photoresist film using the same and exposure apparatus for performing the method of exposing a photoresist film

KIM JEONG MIN

Maskless exposure apparatus and stitching exposure method using the same

HONG SANG JOON

Actuator, stage device, and exposure apparatus

BAEK DONG SEOK

Maskless exposure apparatus having measurement optical unit to measure depths of focus of a plurality of beams and control method thereof

CHOI HO SEOK

Exposure apparatuses and methods to compress exposure data