Inventor
KUERZ BIRGIT
DE3 patents
Patents
3 patentsUS7605386B2Oct 20, 2009
Optical device with raster elements, and illumination system with the optical device
ZEISS CARL SMT AG21 citations91
US7239447B2Jul 3, 2007
Objective with crystal lenses
ZEISS CARL SMT AG4 citations61
US7542217B2Jun 2, 2009
Beam reshaping unit for an illumination system of a microlithographic projection exposure apparatus
ZEISS CARL SMT AG1 citations51