Inventor
MATSUMOTO MICHIKAZU
JP24 patents
⚠️ This page may combine multiple inventors who share the name “MATSUMOTO MICHIKAZU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
MATSUSHITA ELECTRIC INDUSTRIAL CO LTD
19 patentsUS5726479AMar 10, 1998
Semiconductor device having polysilicon electrode minimization resulting in a small resistance value
MATSUSHITA ELECTRIC INDUSTRIAL CO LTD79 citations96
US6451690B1Sep 17, 2002
Method of forming electrode structure and method of fabricating semiconductor device
MATSUSHITA ELECTRIC INDUSTRIAL CO LTD61 citations95
US7126174B2Oct 24, 2006
Semiconductor device and method of manufacturing the same
MATSUSHITA ELECTRIC INDUSTRIAL CO LTD13 citations92
US6664196B1Dec 16, 2003
Method of cleaning electronic device and method of fabricating the same
MATSUSHITA ELECTRIC INDUSTRIAL CO LTD36 citations92
US6297517B1Oct 2, 2001
Semiconductor device and method of fabricating the same
MATSUSHITA ELECTRIC INDUSTRIAL CO LTD24 citations92
US6281562B1Aug 28, 2001
Semiconductor device which reduces the minimum distance requirements between active areas
MATSUSHITA ELECTRIC INDUSTRIAL CO LTD28 citations92
US5677249AOct 14, 1997
Semiconductor apparatus and production method for the same
MATSUSHITA ELECTRIC INDUSTRIAL CO LTD24 citations92
US5382544AJan 17, 1995
Manufacturing method of a semiconductor device utilizing thin metal film
MATSUSHITA ELECTRIC INDUSTRIAL CO LTD21 citations92
US6593219B2Jul 15, 2003
Method for fabricating electrode structure and method for fabricating semiconductor device
MATSUSHITA ELECTRIC INDUSTRIAL CO LTD26 citations91
US6509254B1Jan 21, 2003
Method of forming electrode structure and method of fabricating semiconductor device
MATSUSHITA ELECTRIC INDUSTRIAL CO LTD35 citations91
US7202147B2Apr 10, 2007
Semiconductor device and method for fabricating the same
MATSUSHITA ELECTRIC INDUSTRIAL CO LTD7 citations74
US6214126B1Apr 10, 2001
Method for cleaning a silicon substrate
MATSUSHITA ELECTRIC INDUSTRIAL CO LTD9 citations73
US7253436B2Aug 7, 2007
Resistance defect assessment device, resistance defect assessment method, and method for manufacturing resistance defect assessment device
MATSUSHITA ELECTRIC INDUSTRIAL CO LTD9 citations68
US6967409B2Nov 22, 2005
Semiconductor device and method of manufacturing the same
MATSUSHITA ELECTRIC INDUSTRIAL CO LTD3 citations63
US6709950B2Mar 23, 2004
Semiconductor device and method of manufacturing the same
MATSUSHITA ELECTRIC INDUSTRIAL CO LTD2 citations63
US6660601B2Dec 9, 2003
Semiconductor device and method for fabricating the same
MATSUSHITA ELECTRIC INDUSTRIAL CO LTD4 citations62
US6720241B2Apr 13, 2004
Method for manufacturing semiconductor device
MATSUSHITA ELECTRIC INDUSTRIAL CO LTD5 citations60
US6946305B2Sep 20, 2005
Apparatus for evaluating amount of charge, method for fabricating the same, and method for evaluating amount of charge
MATSUSHITA ELECTRIC INDUSTRIAL CO LTD0 citations40
US6879043B2Apr 12, 2005
Electrode structure and method for fabricating the same
MATSUSHITA ELECTRIC INDUSTRIAL CO LTD0 citations40
PANASONIC CORP
3 patentsUS7800181B2Sep 21, 2010
Semiconductor device and method for fabricating the same
PANASONIC CORP2 citations62
US7585767B2Sep 8, 2009
Semiconductor device and method for fabricating the same
PANASONIC CORP0 citations52
US7851891B2Dec 14, 2010
Semiconductor device and method for fabricating the same
PANASONIC CORP1 citations51