Inventor
KAUSHAL SANJEEV
US34 patents
⚠️ This page may combine multiple inventors who share the name “KAUSHAL SANJEEV”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
27 patentsUS7101816B2Sep 5, 2006
Methods for adaptive real time control of a thermal processing system
TOKYO ELECTRON LTD33 citations92
US7025280B2Apr 11, 2006
Adaptive real time control of a reticle/mask system
TOKYO ELECTRON LTD41 citations92
US9424528B2Aug 23, 2016
Method and apparatus for self-learning and self-improving a semiconductor manufacturing tool
TOKYO ELECTRON LTD11 citations84
US9396443B2Jul 19, 2016
System and method for learning and/or optimizing manufacturing processes
TOKYO ELECTRON LTD6 citations84
US8744607B2Jun 3, 2014
Method and apparatus for self-learning and self-improving a semiconductor manufacturing tool
TOKYO ELECTRON LTD12 citations84
US7452793B2Nov 18, 2008
Wafer curvature estimation, monitoring, and compensation
TOKYO ELECTRON LTD15 citations84
US7737051B2Jun 15, 2010
Silicon germanium surface layer for high-k dielectric integration
TOKYO ELECTRON LTD8 citations83
US7165011B1Jan 16, 2007
Built-in self test for a thermal processing system
TOKYO ELECTRON LTD11 citations82
US7561269B2Jul 14, 2009
Optical measurement system with systematic error correction
TOKYO ELECTRON LTD8 citations81
US8026113B2Sep 27, 2011
Method of monitoring a semiconductor processing system using a wireless sensor network
TOKYO ELECTRON LTD17 citations79
US7342244B2Mar 11, 2008
Spintronic transistor
TOKYO ELECTRON LTD13 citations79
US7519885B2Apr 14, 2009
Monitoring a monolayer deposition (MLD) system using a built-in self test (BIST) table
TOKYO ELECTRON LTD7 citations74
US10133265B2Nov 20, 2018
Method and apparatus for autonomous identification of particle contamination due to isolated process events and systematic trends
TOKYO ELECTRON LTD2 citations71
US7710565B2May 4, 2010
Method of correcting systematic error in a metrology system
TOKYO ELECTRON LTD7 citations71
US9746849B2Aug 29, 2017
Method and apparatus for autonomous tool parameter impact identification system for semiconductor manufacturing
TOKYO ELECTRON LTD3 citations70
US7838072B2Nov 23, 2010
Method and apparatus for monolayer deposition (MLD)
TOKYO ELECTRON LTD7 citations63
US7526699B2Apr 28, 2009
Method for creating a built-in self test (BIST) table for monitoring a monolayer deposition (MLD) system
TOKYO ELECTRON LTD5 citations63
US7459175B2Dec 2, 2008
Method for monolayer deposition
TOKYO ELECTRON LTD2 citations63
US7444572B2Oct 28, 2008
Built-in self test for a thermal processing system
TOKYO ELECTRON LTD4 citations63
US7406644B2Jul 29, 2008
Monitoring a thermal processing system
TOKYO ELECTRON LTD4 citations63
US7340377B2Mar 4, 2008
Monitoring a single-wafer processing system
TOKYO ELECTRON LTD2 citations63
US7302363B2Nov 27, 2007
Monitoring a system during low-pressure processes
TOKYO ELECTRON LTD6 citations63
US9405289B2Aug 2, 2016
Method and apparatus for autonomous identification of particle contamination due to isolated process events and systematic trends
TOKYO ELECTRON LTD2 citations60
US10228678B2Mar 12, 2019
Tool failure analysis using space-distorted similarity
TOKYO ELECTRON LTD1 citations59
US10635993B2Apr 28, 2020
System and method for learning and/or optimizing manufacturing processes
TOKYO ELECTRON LTD0 citations52
US10571900B2Feb 25, 2020
Method and apparatus for autonomous tool parameter impact identification system for semiconductor manufacturing
TOKYO ELECTRON LTD0 citations49
US7141765B2Nov 28, 2006
Heat treating device
TOKYO ELECTRON LTD1 citations49
KAUSHAL SANJEEV
7 patentsUS8396582B2Mar 12, 2013
Method and apparatus for self-learning and self-improving a semiconductor manufacturing tool
KAUSHAL SANJEEV61 citations97
US8725667B2May 13, 2014
Method and system for detection of tool performance degradation and mismatch
KAUSHAL SANJEEV30 citations92
US8190543B2May 29, 2012
Autonomous biologically based learning tool
KAUSHAL SANJEEV17 citations92
US9275335B2Mar 1, 2016
Autonomous biologically based learning tool
KAUSHAL SANJEEV11 citations83
US8954184B2Feb 10, 2015
Tool performance by linking spectroscopic information with tool operational parameters and material measurement information
KAUSHAL SANJEEV8 citations83
US8078552B2Dec 13, 2011
Autonomous adaptive system and method for improving semiconductor manufacturing quality
KAUSHAL SANJEEV16 citations83
US8723869B2May 13, 2014
Biologically based chamber matching
KAUSHAL SANJEEV8 citations78