Inventor

AOYAMA RYOICHI

JP4 patents

⚠️ This page may combine multiple inventors who share the name “AOYAMA RYOICHI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

OKI ELECTRIC IND CO LTD

2 patents

US6980278B2Dec 27, 2005

Self-cleaning method for semiconductor exposure apparatus

OKI ELECTRIC IND CO LTD11 citations71

US7485975B2Feb 3, 2009

Alignment error measuring mark and method for manufacturing semiconductor device using the same

OKI ELECTRIC IND CO LTD2 citations56

OKI SEMICONDUCTOR CO LTD

1 patent

US7733460B2Jun 8, 2010

Aligner and self-cleaning method for aligner

OKI SEMICONDUCTOR CO LTD0 citations49

AOYAMA RYOICHI

1 patent

US8198015B2Jun 12, 2012

Method of forming mask pattern

AOYAMA RYOICHI1 citations39