Inventor
HOSHINO DAIGO
JP6 patents
⚠️ This page may combine multiple inventors who share the name “HOSHINO DAIGO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
OKI ELECTRIC IND CO LTD
5 patentsUS6980278B2Dec 27, 2005
Self-cleaning method for semiconductor exposure apparatus
OKI ELECTRIC IND CO LTD11 citations71
US7074547B2Jul 11, 2006
Photomask and method of fabricating semiconductor device by use of same
OKI ELECTRIC IND CO LTD7 citations70
US6872494B2Mar 29, 2005
Photomask and method of fabricating semiconductor device by use of same
OKI ELECTRIC IND CO LTD6 citations70
US6894782B2May 17, 2005
Method of measuring defocusing and method of obtaining correct focusing
OKI ELECTRIC IND CO LTD3 citations60
US7183025B2Feb 27, 2007
Phase difference specifying method
OKI ELECTRIC IND CO LTD5 citations59