Inventor

JENNINGS DEAN

US57 patents

⚠️ This page may combine multiple inventors who share the name “JENNINGS DEAN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

JENNINGS DEAN

APPLIED MATERIALS INC

Semiconductor substrate process using an optically writable carbon-containing mask

Process for low temperature plasma deposition of an optical absorption layer and high speed optical annealing

Copper conductor annealing process employing high speed optical annealing with a low temperature-deposited optical absorber layer

Semiconductor substrate process using a low temperature deposited carbon-containing hard mask

Low temperature plasma deposition process for carbon layer deposition

Copper barrier reflow process employing high speed optical annealing

Semiconductor junction formation process including low temperature plasma deposition of an optical absorption layer and high speed optical annealing

Thermal flux processing by scanning

Micro grooved support surface for reducing substrate wear and slip formation

Method of laser annealing using two wavelengths of radiation

Dual wavelength thermal flux laser anneal

Thermally processing a substrate

Dynamic surface annealing using addressable laser array with pyrometry feedback

Thermal flux laser annealing for ion implantation of semiconductor P-N junctions

Single axis light pipe for homogenizing slow axis of illumination systems based on laser diodes

Thermal flux deposition by scanning

Apparatus and methods for measuring substrate temperature

Stepped reflector plate

Optimal spike anneal ambient

Adaptive control method for rapid thermal processing of a substrate

Thermally processing a substrate

Absorber layer for DSA processing

Annealing apparatus using two wavelengths of radiation

Apparatus and method of improving beam shaping and beam homogenization

Annealing apparatus using two wavelengths of radiation

High speed phase scrambling of a coherent beam using plasma

Fast axis beam profile shaping by collimation lenslets for high power laser diode based annealing system

Ultra-fast beam dithering with surface acoustic wave modulator

System and method for lamp split zone control

Method of thermal processing structures formed on a substrate

Method of annealing using two wavelengths of continuous wave laser radiation

Annealing apparatus using two wavelengths of radiation

Method and apparatus for decorrelation of spatially and temporally coherent light

Multiple band pass filtering for pyrometry in laser based annealing systems

Multiple band pass filtering for pyrometry in laser based annealing systems

Rapid detection of imminent failure in laser thermal processing of a substrate

Absorber layer for DSA processing

ELANTEC INC

Polysilicon filled trench isolation structure for soi integrated circuits

Method for making a contact structure for a polysilicon filled trench isolation

Method of forming retrograde well in bonded waffers

High precision polishing tool

JENNINGS DEAN

Fast axis beam profile shaping for high power laser diode based annealing system

Annealing apparatus using two wavelengths of laser radiation

Annealing apparatus using two wavelengths of continuous wave laser radiation

ADAMS BRUCE E

Apparatus and method of improving beam shaping and beam homogenization

Apparatus and method of improving beam shaping and beam homogenization

CAREY PAUL

Method of thermal processing structures formed on a substrate

Method of thermal processing structures formed on a substrate

ELANTEC SEMICONDUCTOR INC

Silicon on insulator process with recovery of a device layer from an etch stop layer

NAT SEMICONDUCTOR CORP

High voltage complementary NPN/PNP process