Inventor
TERASHITA YUICHI
JP20 patents
Patents
20 patentsUS6869640B2Mar 22, 2005
Coating film forming method and coating film forming apparatus
TOKYO ELECTRON LTD28 citations92
US7601933B2Oct 13, 2009
Heat processing apparatus and heat processing method
TOKYO ELECTRON LTD8 citations82
US11342198B2May 24, 2022
Processing liquid supplying apparatus and processing liquid supplying method
TOKYO ELECTRON LTD3 citations72
US10074546B2Sep 11, 2018
Processing liquid supplying apparatus and processing liquid supplying method
TOKYO ELECTRON LTD2 citations72
US9731226B2Aug 15, 2017
Solution treatment apparatus and solution treatment method
TOKYO ELECTRON LTD3 citations72
US9732910B2Aug 15, 2017
Processing-liquid supply apparatus and processing-liquid supply method
TOKYO ELECTRON LTD3 citations72
US9690202B2Jun 27, 2017
Developing method, developing apparatus and storage medium
TOKYO ELECTRON LTD2 citations72
US9613836B2Apr 4, 2017
Coating film forming apparatus, coating film forming method, and recording medium
TOKYO ELECTRON LTD6 citations72
US10734251B2Aug 4, 2020
Liquid processing apparatus, liquid processing method, and storage medium for liquid process
TOKYO ELECTRON LTD5 citations71
US10262880B2Apr 16, 2019
Cover plate for wind mark control in spin coating process
TOKYO ELECTRON LTD4 citations70
US10901320B2Jan 26, 2021
Developing method, developing apparatus, and computer-readable recording medium
TOKYO ELECTRON LTD0 citations62
US10120286B2Nov 6, 2018
Developing method, developing apparatus, and computer-readable recording medium
TOKYO ELECTRON LTD0 citations51
US10022652B2Jul 17, 2018
Solution treatment apparatus and solution treatment method
TOKYO ELECTRON LTD1 citations51
US9952512B2Apr 24, 2018
Developing method, developing apparatus, and computer-readable storage medium
TOKYO ELECTRON LTD1 citations51
US9878267B2Jan 30, 2018
Solution treatment apparatus and solution treatment method
TOKYO ELECTRON LTD1 citations51
US9972512B2May 15, 2018
Liquid processing method, memory medium and liquid processing apparatus
TOKYO ELECTRON LTD0 citations48
US9786488B2Oct 10, 2017
Liquid processing method, memory medium and liquid processing apparatus
TOKYO ELECTRON LTD0 citations48
US10101669B2Oct 16, 2018
Exposure apparatus, resist pattern forming method, and storage medium
TOKYO ELECTRON LTD0 citations40
US9899243B2Feb 20, 2018
Light irradiation apparatus
TOKYO ELECTRON LTD0 citations39
US7384595B2Jun 10, 2008
Heat-treating apparatus and heat-treating method
TOKYO ELECTRON LTD0 citations38