Inventor

SHIZUKUISHI MOMOKO

JP5 patents

⚠️ This page may combine multiple inventors who share the name “SHIZUKUISHI MOMOKO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

TOKYO ELECTRON LTD

4 patents

US7601933B2Oct 13, 2009

Heat processing apparatus and heat processing method

TOKYO ELECTRON LTD8 citations82

US7367710B2May 6, 2008

Developing solution supply nozzle with stirrer

TOKYO ELECTRON LTD7 citations71

US7846648B2Dec 7, 2010

Substrate developing method, substrate processing method and developing solution supply nozzle

TOKYO ELECTRON LTD2 citations60

US7384595B2Jun 10, 2008

Heat-treating apparatus and heat-treating method

TOKYO ELECTRON LTD0 citations38

SHIZUKUISHI MOMOKO

1 patent

US8415092B2Apr 9, 2013

Substrate developing method, substrate processing method and developing solution supply nozzle

SHIZUKUISHI MOMOKO0 citations43