Inventor
OOKOUCHI ATSUSHI
JP17 patents
⚠️ This page may combine multiple inventors who share the name “OOKOUCHI ATSUSHI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
13 patentsUS6811962B2Nov 2, 2004
Method for developing processing and apparatus for supplying developing solution
TOKYO ELECTRON LTD29 citations92
US8026048B2Sep 27, 2011
Developing apparatus and developing method
TOKYO ELECTRON LTD7 citations84
US7918182B2Apr 5, 2011
Developing device and developing method
TOKYO ELECTRON LTD7 citations84
US7601933B2Oct 13, 2009
Heat processing apparatus and heat processing method
TOKYO ELECTRON LTD8 citations82
US7823534B2Nov 2, 2010
Development device and development method
TOKYO ELECTRON LTD6 citations73
US11774854B2Oct 3, 2023
Substrate processing method, storage medium, and substrate processing apparatus
TOKYO ELECTRON LTD2 citations72
US9704730B2Jul 11, 2017
Substrate cleaning apparatus, substrate cleaning method and non-transitory storage medium
TOKYO ELECTRON LTD2 citations69
US6991385B2Jan 31, 2006
Method for developing processing and apparatus for supplying developing solution
TOKYO ELECTRON LTD4 citations63
US11480881B2Oct 25, 2022
Substrate processing method, storage medium, and substrate processing apparatus
TOKYO ELECTRON LTD0 citations62
US7806076B2Oct 5, 2010
Developing apparatus and method
TOKYO ELECTRON LTD3 citations62
US7896562B2Mar 1, 2011
Developing method, developing apparatus and storage medium
TOKYO ELECTRON LTD1 citations52
US9805958B2Oct 31, 2017
Substrate cleaning apparatus, substrate cleaning method and non-transitory storage medium
TOKYO ELECTRON LTD0 citations48
US9570327B2Feb 14, 2017
Substrate liquid treatment apparatus and substrate liquid treatment method
TOKYO ELECTRON LTD0 citations37