P

Inventor

YAMAMURA KENTARO

JP6 patents
⚠️ This page may combine multiple inventors who share the name “YAMAMURA KENTARO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

TOKYO ELECTRON LTD

4 patents
US7901514B2Mar 8, 2011

Substrate cleaning method and developing apparatus

TOKYO ELECTRON LTD12 citations83
US7604013B2Oct 20, 2009

Substrate cleaning method and developing apparatus

TOKYO ELECTRON LTD11 citations83
US11809091B2Nov 7, 2023

Substrate processing apparatus and processing condition adjustment method

TOKYO ELECTRON LTD0 citations50
US12494390B2Dec 9, 2025

Substrate processing apparatus, substrate processing method and storage medium

TOKYO ELECTRON LTD0 citations39

KOMETANI YASUYUKI

2 patents
US8216390B2Jul 10, 2012

Cleaning and drying-preventing method, and cleaning and drying-preventing apparatus

KOMETANI YASUYUKI3 citations55
US8512478B2Aug 20, 2013

Cleaning and drying-preventing method, and cleaning and drying-preventing apparatus

KOMETANI YASUYUKI0 citations45