Inventor
TAKEGUCHI HIROFUMI
JP28 patents
⚠️ This page may combine multiple inventors who share the name “TAKEGUCHI HIROFUMI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
22 patentsUS6811962B2Nov 2, 2004
Method for developing processing and apparatus for supplying developing solution
TOKYO ELECTRON LTD29 citations92
US6709174B2Mar 23, 2004
Apparatus and method for development
TOKYO ELECTRON LTD27 citations92
US9256131B2Feb 9, 2016
Developing method for developing apparatus
TOKYO ELECTRON LTD7 citations84
US8026048B2Sep 27, 2011
Developing apparatus and developing method
TOKYO ELECTRON LTD7 citations84
US7918182B2Apr 5, 2011
Developing device and developing method
TOKYO ELECTRON LTD7 citations84
US7901514B2Mar 8, 2011
Substrate cleaning method and developing apparatus
TOKYO ELECTRON LTD12 citations83
US7604013B2Oct 20, 2009
Substrate cleaning method and developing apparatus
TOKYO ELECTRON LTD11 citations83
US7823534B2Nov 2, 2010
Development device and development method
TOKYO ELECTRON LTD6 citations73
US9731226B2Aug 15, 2017
Solution treatment apparatus and solution treatment method
TOKYO ELECTRON LTD3 citations72
US9690202B2Jun 27, 2017
Developing method, developing apparatus and storage medium
TOKYO ELECTRON LTD2 citations72
US7841787B2Nov 30, 2010
Rinsing method, developing method, developing system and computer-read storage medium
TOKYO ELECTRON LTD3 citations63
US7665918B2Feb 23, 2010
Developing apparatus, developing method and storage medium
TOKYO ELECTRON LTD4 citations63
US6991385B2Jan 31, 2006
Method for developing processing and apparatus for supplying developing solution
TOKYO ELECTRON LTD4 citations63
US10901320B2Jan 26, 2021
Developing method, developing apparatus, and computer-readable recording medium
TOKYO ELECTRON LTD0 citations62
US7806076B2Oct 5, 2010
Developing apparatus and method
TOKYO ELECTRON LTD3 citations62
US7896562B2Mar 1, 2011
Developing method, developing apparatus and storage medium
TOKYO ELECTRON LTD1 citations52
US10120286B2Nov 6, 2018
Developing method, developing apparatus, and computer-readable recording medium
TOKYO ELECTRON LTD0 citations51
US10022652B2Jul 17, 2018
Solution treatment apparatus and solution treatment method
TOKYO ELECTRON LTD1 citations51
US9952512B2Apr 24, 2018
Developing method, developing apparatus, and computer-readable storage medium
TOKYO ELECTRON LTD1 citations51
US9878267B2Jan 30, 2018
Solution treatment apparatus and solution treatment method
TOKYO ELECTRON LTD1 citations51
US11769661B2Sep 26, 2023
Substrate processing method and substrate processing apparatus
TOKYO ELECTRON LTD0 citations47
US8029624B2Oct 4, 2011
Rinse method and developing apparatus
TOKYO ELECTRON LTD0 citations42
TAKEGUCHI HIROFUMI
4 patentsUS8865396B2Oct 21, 2014
Developing method and developing apparatus
TAKEGUCHI HIROFUMI5 citations72
US8956694B2Feb 17, 2015
Developing apparatus, developing method and storage medium
TAKEGUCHI HIROFUMI4 citations71
US8469614B2Jun 25, 2013
Substrate treatment method, computer storage medium and substrate treatment apparatus
TAKEGUCHI HIROFUMI0 citations51
US8147153B2Apr 3, 2012
Rinsing method, developing method, developing system and computer-read storage medium
TAKEGUCHI HIROFUMI1 citations51