Inventor
FELLIS AARON R
US10 patents
⚠️ This page may combine multiple inventors who share the name “FELLIS AARON R”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
CHANDRASHEKAR ANAND
3 patentsUS8435894B2May 7, 2013
Depositing tungsten into high aspect ratio features
CHANDRASHEKAR ANAND314 citations99
US8124531B2Feb 28, 2012
Depositing tungsten into high aspect ratio features
CHANDRASHEKAR ANAND64 citations98
US9034768B2May 19, 2015
Depositing tungsten into high aspect ratio features
CHANDRASHEKAR ANAND32 citations94
NOVELLUS SYSTEMS INC
3 patentsUS7141494B2Nov 28, 2006
Method for reducing tungsten film roughness and improving step coverage
NOVELLUS SYSTEMS INC147 citations98
US7262125B2Aug 28, 2007
Method of forming low-resistivity tungsten interconnects
NOVELLUS SYSTEMS INC91 citations97
US8835317B2Sep 16, 2014
Depositing tungsten into high aspect ratio features
NOVELLUS SYSTEMS INC33 citations94