Inventor
YANAGISAWA YOSHIHIKO
JP12 patents
⚠️ This page may combine multiple inventors who share the name “YANAGISAWA YOSHIHIKO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
KOKUSAI ELECTRIC CORP
7 patentsUS11177143B2Nov 16, 2021
Substrate processing apparatus, method of manufacturing semiconductor device, and recording medium
KOKUSAI ELECTRIC CORP5 citations72
US11309195B2Apr 19, 2022
Heating element, substrate processing apparatus and method of manufacturing semiconductor device
KOKUSAI ELECTRIC CORP0 citations61
US11018033B2May 25, 2021
Substrate processing apparatus, method of manufacturing semiconductor device, and recording medium
KOKUSAI ELECTRIC CORP1 citations61
US11127608B2Sep 21, 2021
Heating element, substrate processing apparatus, and method of manufacturing semiconductor device
KOKUSAI ELECTRIC CORP0 citations60
US12392032B2Aug 19, 2025
Substrate processing apparatus with cleaning of exhaust system
KOKUSAI ELECTRIC CORP0 citations51
US11265977B2Mar 1, 2022
Substrate processing apparatus, method of manufacturing semiconductor device, and recording medium
KOKUSAI ELECTRIC CORP0 citations50
US12255069B2Mar 18, 2025
Substrate processing apparatus, method of manufacturing semiconductor device and non-transitory computer-readable recording medium
KOKUSAI ELECTRIC CORP0 citations49
HITACHI INT ELECTRIC INC
3 patentsUS7943528B2May 17, 2011
Substrate processing apparatus and semiconductor devices manufacturing method
HITACHI INT ELECTRIC INC2 citations60
US9518321B2Dec 13, 2016
Atomic layer deposition processing apparatus to reduce heat energy conduction
HITACHI INT ELECTRIC INC1 citations51
US9546422B2Jan 17, 2017
Semiconductor device manufacturing method and substrate processing method including a cleaning method
HITACHI INT ELECTRIC INC0 citations39