Inventor

TANABE MITSURO

JP7 patents

⚠️ This page may combine multiple inventors who share the name “TANABE MITSURO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

HITACHI INT ELECTRIC INC

3 patents

US8367566B2Feb 5, 2013

Method for manufacturing semiconductor device and method for processing substrate

HITACHI INT ELECTRIC INC5 citations83

US7943528B2May 17, 2011

Substrate processing apparatus and semiconductor devices manufacturing method

HITACHI INT ELECTRIC INC2 citations60

US9518321B2Dec 13, 2016

Atomic layer deposition processing apparatus to reduce heat energy conduction

HITACHI INT ELECTRIC INC1 citations51

YANAGISAWA YOSHIHIKO

2 patents

US8172950B2May 8, 2012

Substrate processing apparatus and semiconductor device producing method

YANAGISAWA YOSHIHIKO6 citations67

US8222161B2Jul 17, 2012

Substrate processing apparatus and semiconductor devices manufacturing method

YANAGISAWA YOSHIHIKO0 citations47

SANO ATSUSHI

1 patent

US8235001B2Aug 7, 2012

Substrate processing apparatus and method for manufacturing semiconductor device

SANO ATSUSHI30 citations91

KOKUSAI ELECTRIC CORP

1 patent

US10978310B2Apr 13, 2021

Method of manufacturing semiconductor device and non-transitory computer-readable recording medium capable of adjusting substrate temperature

KOKUSAI ELECTRIC CORP0 citations62