Inventor
LU CHIH-CHENG
TW12 patents
⚠️ This page may combine multiple inventors who share the name “LU CHIH-CHENG”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TAIWAN SEMICONDUCTOR MFG
4 patentsUS7118987B2Oct 10, 2006
Method of achieving improved STI gap fill with reduced stress
TAIWAN SEMICONDUCTOR MFG109 citations97
US6693047B1Feb 17, 2004
Method for recycling semiconductor wafers having carbon doped low-k dielectric layers
TAIWAN SEMICONDUCTOR MFG38 citations89
US7098116B2Aug 29, 2006
Shallow trench isolation method for reducing oxide thickness variations at different pattern densities
TAIWAN SEMICONDUCTOR MFG8 citations67
US7002177B2Feb 21, 2006
Test region layout for shallow trench isolation
TAIWAN SEMICONDUCTOR MFG1 citations47