Inventor
GUSTAFSSON PER-ERIK
SE9 patents
⚠️ This page may combine multiple inventors who share the name “GUSTAFSSON PER-ERIK”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
WAHLSTEN MIKAEL
5 patentsUS9032342B2May 12, 2015
Method and apparatus for alignment optimization with respect to plurality of layers
WAHLSTEN MIKAEL7 citations81
US8594825B2Nov 26, 2013
Method and apparatus for alignment optimization with respect to plurality of layers for writing different layers with different machine configurations
WAHLSTEN MIKAEL6 citations77
US9341962B2May 17, 2016
Method and apparatus for performing pattern alignment to die
WAHLSTEN MIKAEL3 citations70
US8594824B2Nov 26, 2013
Method and apparatus for performing pattern alignment to plurality of dies
WAHLSTEN MIKAEL1 citations49
US8530120B2Sep 10, 2013
Method and apparatus for performing pattern reconnection after individual or multipart alignment
WAHLSTEN MIKAEL1 citations49