Inventor
KAWAKAMI EIGO
JP46 patents
⚠️ This page may combine multiple inventors who share the name “KAWAKAMI EIGO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
CANON KK
36 patentsUS5721721AFeb 24, 1998
Two scanning probes information recording/reproducing system with one probe to detect atomic reference location on a recording medium
CANON KK120 citations98
US5519686AMay 21, 1996
Encoder for controlling measurements in the range of a few angstroms
CANON KK69 citations96
US5072116ADec 10, 1991
Microprobe preparation thereof and electronic device by use of said microprobe
CANON KK93 citations96
US4985186AJan 15, 1991
Process for producing optical element
CANON KK102 citations96
US4802746AFeb 7, 1989
Variable-focus optical element and focus detecting device utilizing the same
CANON KK87 citations96
US4788596ANov 29, 1988
Image stabilizing device
CANON KK57 citations96
US4780739AOct 25, 1988
Anti-vibration imaging device
CANON KK105 citations96
US4640592AFeb 3, 1987
Optical display utilizing thermally formed bubble in a liquid core waveguide
CANON KK58 citations96
US5994698ANov 30, 1999
Microprobe, preparation thereof and electronic device by use of said microprobe
CANON KK34 citations93
US5255258AOct 19, 1993
Microprobe, preparation thereof and electronic device by use of said microprobe
CANON KK22 citations93
US5157700AOct 20, 1992
Exposure apparatus for controlling intensity of exposure radiation
CANON KK41 citations93
US7815424B2Oct 19, 2010
Imprinting machine and device manufacturing method
CANON KK20 citations92
US7180575B2Feb 20, 2007
Exposure apparatus and device manufacturing method
CANON KK20 citations92
US4685766AAug 11, 1987
Optical device
CANON KK31 citations92
US7815425B2Oct 19, 2010
Processing apparatus
CANON KK8 citations84
US7807065B2Oct 5, 2010
Processing method
CANON KK8 citations84
US7789647B2Sep 7, 2010
Processing apparatus and method
CANON KK9 citations84
US7381272B2Jun 3, 2008
Processing apparatus
CANON KK14 citations84
US5641264AJun 24, 1997
Substrate conveying device and method of controlling the same
CANON KK9 citations74
US5482002AJan 9, 1996
Microprobe, preparation thereof and electronic device by use of said microprobe
CANON KK7 citations74
US5443932AAug 22, 1995
Exposure method
CANON KK13 citations74
US5226523AJul 13, 1993
Conveying apparatus and method of controlling the same
CANON KK8 citations74
US5008703AApr 16, 1991
Exposure apparatus and control of the same
CANON KK18 citations74
US4667316AMay 19, 1987
Information recording-reproducing apparatus
CANON KK18 citations74
US7846346B1Dec 7, 2010
Processing apparatus and method
CANON KK4 citations63
US7785091B2Aug 31, 2010
Processing apparatus and device manufacturing method
CANON KK6 citations63
US7719659B2May 18, 2010
Exposure apparatus and device manufacturing method
CANON KK2 citations63
US7690912B2Apr 6, 2010
Pattern transferring mold, pattern transferring apparatus and device manufacturing method using the same
CANON KK5 citations63
US7382434B2Jun 3, 2008
Exposure apparatus and device manufacturing method
CANON KK2 citations63
US7236231B2Jun 26, 2007
Exposure apparatus and device manufacturing method
CANON KK2 citations63
US7233383B2Jun 19, 2007
Exposure apparatus, device manufacturing method, pattern generator and maintenance method to check for pixel deterioration
CANON KK5 citations63
US7196321B2Mar 27, 2007
Fine pattern forming apparatus and fine pattern inspecting apparatus
CANON KK6 citations63
US6990173B1Jan 24, 2006
Positioning apparatus, atmosphere substituting method, exposure apparatus, and device manufacturing method
CANON KK6 citations63
US5276725AJan 4, 1994
Exposure system
CANON KK3 citations63
US4971455ANov 20, 1990
Slider
CANON KK6 citations63
US7649184B2Jan 19, 2010
Processing method and system
CANON KK0 citations42
KAWAKAMI EIGO
7 patentsUS8734701B2May 27, 2014
Imprint apparatus and method of manufacturing article
KAWAKAMI EIGO11 citations84
US8226392B2Jul 24, 2012
Transfer apparatus and method of manufacturing device
KAWAKAMI EIGO10 citations84
US9039402B2May 26, 2015
Imprinting apparatus and method therefor
KAWAKAMI EIGO7 citations83
US8414279B2Apr 9, 2013
Imprint apparatus and article manufacturing method
KAWAKAMI EIGO5 citations73
US8770964B2Jul 8, 2014
Imprint apparatus and article manufacturing method
KAWAKAMI EIGO3 citations62
US8404169B2Mar 26, 2013
Imprint apparatus and method of manufacturing article
KAWAKAMI EIGO4 citations62
US9188854B2Nov 17, 2015
Transfer apparatus and method of manufacturing device
KAWAKAMI EIGO0 citations52