Inventor
BASSETT DEREK
GB6 patents
⚠️ This page may combine multiple inventors who share the name “BASSETT DEREK”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
4 patentsUS10916440B2Feb 9, 2021
Process and apparatus for processing a nitride structure without silica deposition
TOKYO ELECTRON LTD0 citations61
US10515820B2Dec 24, 2019
Process and apparatus for processing a nitride structure without silica deposition
TOKYO ELECTRON LTD1 citations61
US10886290B2Jan 5, 2021
Etching of silicon nitride and silica deposition control in 3D NAND structures
TOKYO ELECTRON LTD1 citations54
US11376640B2Jul 5, 2022
Apparatus and method to electrostatically remove foreign matter from substrate surfaces
TOKYO ELECTRON LTD0 citations47