Inventor
TRAN CONG
US6 patents
⚠️ This page may combine multiple inventors who share the name “TRAN CONG”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
MULTIBEAM CORP
5 patentsUS9207539B1Dec 8, 2015
Automatic optimization of etch process for accelerated yield ramp with matched charged particle multi-beam systems
MULTIBEAM CORP13 citations92
US8999627B1Apr 7, 2015
Matched multiple charged particle beam systems for lithographic patterning, inspection, and accelerated yield ramp
MULTIBEAM CORP15 citations92
US9184027B1Nov 10, 2015
Matched multiple charged particle beam systems for lithographic patterning, inspection, and accelerated yield ramp
MULTIBEAM CORP10 citations83
US8999628B1Apr 7, 2015
Automatic optimization of etch process for accelerated yield ramp with matched charged particle multi-beam systems
MULTIBEAM CORP10 citations83
US9620332B1Apr 11, 2017
Charged particle beam substrate inspection using both vector and raster scanning
MULTIBEAM CORP14 citations82