Inventor
PALM TROY
US6 patents
⚠️ This page may combine multiple inventors who share the name “PALM TROY”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
RUDOLPH TECH INC
4 patentsUS9460953B2Oct 4, 2016
Edge grip substrate handler
RUDOLPH TECH INC3 citations68
US9431282B2Aug 30, 2016
Wafer inversion mechanism
RUDOLPH TECH INC0 citations46
US10014228B2Jul 3, 2018
Method and apparatus to assist the processing of deformed substrates
RUDOLPH TECH INC0 citations44
US9437467B2Sep 6, 2016
Substrate handler
RUDOLPH TECH INC0 citations39