Inventor
TETIKER MEHMET DERYA
US16 patents
⚠️ This page may combine multiple inventors who share the name “TETIKER MEHMET DERYA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
LAM RES CORP
13 patentsUS10254641B2Apr 9, 2019
Layout pattern proximity correction through fast edge placement error prediction
LAM RES CORP32 citations93
US9792393B2Oct 17, 2017
Methods and apparatuses for etch profile optimization by reflectance spectra matching and surface kinetic model optimization
LAM RES CORP19 citations92
US10032681B2Jul 24, 2018
Etch metric sensitivity for endpoint detection
LAM RES CORP25 citations90
US10534257B2Jan 14, 2020
Layout pattern proximity correction through edge placement error prediction
LAM RES CORP17 citations86
US10386828B2Aug 20, 2019
Methods and apparatuses for etch profile matching by surface kinetic model optimization
LAM RES CORP8 citations84
US10303830B2May 28, 2019
Methods and apparatuses for etch profile optimization by reflectance spectra matching and surface kinetic model optimization
LAM RES CORP9 citations84
US9996647B2Jun 12, 2018
Methods and apparatuses for etch profile optimization by reflectance spectra matching and surface kinetic model optimization
LAM RES CORP12 citations84
US10572697B2Feb 25, 2020
Method of etch model calibration using optical scatterometry
LAM RES CORP9 citations83
US11704463B2Jul 18, 2023
Method of etch model calibration using optical scatterometry
LAM RES CORP1 citations72
US10997345B2May 4, 2021
Method of etch model calibration using optical scatterometry
LAM RES CORP3 citations72
US9640371B2May 2, 2017
System and method for detecting a process point in multi-mode pulse processes
LAM RES CORP2 citations72
US10242849B2Mar 26, 2019
System and method for detecting a process point in multi-mode pulse processes
LAM RES CORP1 citations62
US12581917B2Mar 17, 2026
Matching pre-processing and post-processing substrate samples
LAM RES CORP0 citations48
CORNING INC
3 patentsUS9359250B2Jun 7, 2016
Substrate ion exchange systems with single- and multi-component ion exchange baths and methods for maintaining such systems
CORNING INC3 citations72
US9290410B2Mar 22, 2016
Method for sludge control in wet acid etching
CORNING INC0 citations51
US10683234B2Jun 16, 2020
Methods of making antimicrobial glass articles
CORNING INC0 citations40