Inventor
TRAH HANS-PETER
DE18 patents
Patents
18 patentsUS5375979ADec 27, 1994
Thermal micropump with values formed from silicon plates
BOSCH GMBH ROBERT355 citations98
US5344117ASep 6, 1994
Micro-actuator
BOSCH GMBH ROBERT60 citations96
US5244154ASep 14, 1993
Perforated plate and fuel injection valve having a performated plate
BOSCH GMBH ROBERT108 citations96
US5216273AJun 1, 1993
Microvalve of multilayer silicon construction
BOSCH GMBH ROBERT103 citations95
US6462392B1Oct 8, 2002
Micromechanical cap structure and the respective manufacturing method
BOSCH GMBH ROBERT27 citations92
US5215244AJun 1, 1993
Method of mounting silicon wafers on metallic mounting surfaces
BOSCH GMBH ROBERT55 citations92
US6062088AMay 16, 2000
Pressure sensor
BOSCH GMBH ROBERT24 citations91
US5254209AOct 19, 1993
Method of making micromechanical components
BOSCH GMBH ROBERT33 citations90
US6863438B2Mar 8, 2005
Microstructured thermosensor
BOSCH GMBH ROBERT13 citations84
US5595940AJan 21, 1997
Method of producing micromechanical structures
BOSCH GMBH ROBERT13 citations74
US6989609B2Jan 24, 2006
Method and apparatus for supplying energy to sensors
BOSCH GMBH ROBERT6 citations73
US5402937AApr 4, 1995
Perforated body and valve with perforated body
BOSCH GMBH ROBERT16 citations73
US5282926AFeb 1, 1994
Method of anisotropically etching monocrystalline, disk-shaped wafers
BOSCH GMBH ROBERT17 citations73
US5261639ANov 16, 1993
Valve
BOSCH GMBH ROBERT9 citations73
US5242533ASep 7, 1993
Method of structuring a semiconductor chip
BOSCH GMBH ROBERT17 citations73
US7709933B2May 4, 2010
Structural element having a porous region at least regionally provided with a cover layer and its use as well as method for setting the thermal conductivity of a porous region
BOSCH GMBH ROBERT4 citations63
US7321156B2Jan 22, 2008
Device for capacitive pressure measurement and method for manufacturing a capacitive pressure measuring device
BOSCH GMBH ROBERT5 citations62
US5286341AFeb 15, 1994
Process for producing micro-mechanical structures
BOSCH GMBH ROBERT4 citations62