Inventor

YAKUSHIJI HIDEAKI

JP4 patents

⚠️ This page may combine multiple inventors who share the name “YAKUSHIJI HIDEAKI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

TOKYO ELECTRON LTD

2 patents

US9984907B2May 29, 2018

Evacuation method and vacuum processing apparatus

TOKYO ELECTRON LTD2 citations65

US10192719B2Jan 29, 2019

Plasma processing method

TOKYO ELECTRON LTD0 citations37

YAMAWAKU JUN

1 patent

US8516715B2Aug 27, 2013

Evacuation method and storage medium

YAMAWAKU JUN0 citations47

MORIYA TSUYOSHI

1 patent

US8243265B2Aug 14, 2012

Method and apparatus for detecting foreign materials and storage medium

MORIYA TSUYOSHI0 citations38