Inventor
RZESZUT RICHARD J
US5 patents
⚠️ This page may combine multiple inventors who share the name “RZESZUT RICHARD J”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
AXCELIS TECH INC
4 patentsUS6515290B1Feb 4, 2003
Bulk gas delivery system for ion implanters
AXCELIS TECH INC27 citations87
US10087520B2Oct 2, 2018
Implantation using solid aluminum iodide (AlI3) for producing atomic aluminum ions and in situ cleaning of aluminum iodide and associated by-products
AXCELIS TECH INC5 citations67
US10774419B2Sep 15, 2020
Implantation using solid aluminum iodide (ALI3) for producing atomic aluminum ions and in situ cleaning of aluminum iodide and associated by-products
AXCELIS TECH INC3 citations65
US8023247B2Sep 20, 2011
Electrostatic chuck with compliant coat
AXCELIS TECH INC0 citations50